United States Patent 7,419,416
Tsukamoto September 2, 2008
Electron emission element, electron source, image display device, and method of manufacturing the same
Abstract
A method of manufacturing an electron emission element, including forming common wire electrodes (signal lines) (4a, 4b) on a substrate (1) and forming electron emission units including fibrous material assemblies (6a, 6b) on the common wire electrodes (4a, 4b), respectively, for preventing abnormal discharge caused by an antistatic film (7) with no deterioration in characteristics of the electron emission element. The electrode forming is followed by forming resist patterns (40a, 40b) covering at least part of the common wire electrodes (4a, 4b) before the antistatic film is formed. Thereafter the resist patterns (40a, 40b) on the common wire electrodes (4a, 4b) are removed together with the antistatic film (7) before the electron emission unit is formed, so that the electron emission units made of the fibrous material assemblies (6a, 6b) are formed on the common wire electrodes (4a, 4b) from which the resist patterns (40a, 40b) have been removed.
Inventors: Tsukamoto; Takeo (Atsugi, JP)
Assignee: Canon Kabushiki Kaisha (Tokyo, JP)
Appl. No.: 11/021,473
Filed: December 23, 2004
Foreign Application Priority Data
Dec 26, 2003 [JP] 2003-432500
According to a first aspect of the present invention, preferably the fibrous material is a carbon nano-tube or a graphite nanofiber.
......
(6) By using printing paste material containing the fibrous material (carbon nano-tubes in this embodiment) and properly containing organic material, inorganic material, and photosensitive organic material, the fibrous material assemblies 6a and 6b that are electron emission units are formed by printing on a part of the common wire electrodes (signal lines) 4a and 4b, respectively. Thereafter, they are precisely shaped by photolithography using light transmitted from a rear face of the substrate 1.
Source
